Piano MEMs micromirror

Details Piano MEMs micromirror Piano MEMs micromirror

2005-08-23

2005-08-23

Ullah, Akm Enayet (Department: 2874)

Optical waveguides

With optical coupler

Switch

C385S016000, C359S223100, C359S224200

Reexamination Certificate

active

06934439

ABSTRACT:
A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes.

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“Single-Chip 1×84 MEMS Mirror Array for Optical Telecommunication Applications” by Juneau et al, MOEMS and Miniaturized Systems III, James H. Smith, Editor. SPIE vol. 4983 (2003) pp. 53 to 64.

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