Physical quantity sensor, method for manufacturing the same,...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal

Reexamination Certificate

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C257S717000, C257SE27122

Reexamination Certificate

active

07615832

ABSTRACT:
A sensor includes: a semiconductor chip having a sensing portion and a first bump; a circuit chip having a second bump; and a resin film having a groove. The semiconductor chip and the circuit chip are integrated with sandwiching the resin film therebetween. The resin film includes a first space and a second space before the first bump is bonded to the second bump. The first space faces the sensing portion. The second space is disposed on a periphery of the first space. The resin film expands when the first bump is bonded to the second bump. The second space accommodates an expanded portion of the resin film. The first space provides the groove after the first bump is bonded to the second bump.

REFERENCES:
patent: 6204556 (2001-03-01), Hakamata
patent: 6316840 (2001-11-01), Otani
patent: 6522015 (2003-02-01), Glenn et al.
patent: 7009302 (2006-03-01), Tao
patent: 7327004 (2008-02-01), Hattori et al.
patent: 2003/0164529 (2003-09-01), Inoue et al.
patent: A-11-008270 (1999-01-01), None

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