Physical quantity sensor having sensor chip and circuit chip

Details Physical quantity sensor having sensor chip and circuit chip Physical quantity sensor having sensor chip and circuit chip

2007-09-04

2007-09-04

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S493000, C361S280000

Reexamination Certificate

active

11052090

ABSTRACT:
A physical quantity sensor includes: a circuit chip; and a sensor chip disposed on the circuit chip through an adhesive layer. The sensor chip includes: a support substrate; a movable electrode; and a pair of fixed electrodes facing the movable electrode with a detection distance therebetween. The movable electrode and the fixed electrodes are disposed on the substrate. The adhesive layer includes a non-adhesive region and a conductive member. The non-adhesive region is disposed on a region obtained by projecting the sensor chip to the circuit chip. The conductive member is disposed in the non-adhesive region for electrically connecting between the circuit chip and the substrate.

REFERENCES:
patent: 5864063 (1999-01-01), Otani et al.
patent: 6151966 (2000-11-01), Sakai et al.
patent: 6644117 (2003-11-01), Kueck et al.
patent: 6763716 (2004-07-01), Nagahara et al.
patent: 6935176 (2005-08-01), Goto et al.
Examination Report from Chinese Patent Office issued on Aug. 25, 2006 for the corresponding Chinese patent application No. 200510007074.9 (a copy and English translation thereof).

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