Physical quantity sensor having movable portion

Details Physical quantity sensor having movable portion Physical quantity sensor having movable portion

2007-12-04

2007-12-04

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504120

Reexamination Certificate

active

11201271

ABSTRACT:
An angular rate sensor includes: a support substrate; a semiconductor layer; and a movable portion. The movable portion includes a driving vibration portion and a detecting vibration portion. The driving vibration portion is capable of vibrating in a first direction. The detecting vibration portion is capable of vibrating in a second direction. The driving vibration portion includes through holes, and the detecting vibration portion includes thorough holes. Each through hole of the driving vibration portion has an elongated shape extending in the first direction. Each through hole of the detecting vibration portion has an elongated shape extending in the second direction.

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Office Action from German Patent Office issued on Dec. 20, 2006 for the corresponding German patent application No. 10 2005 038 914.7-52 ( a copy and English translation thereof).

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