Physical quantity sensor having beam

Details Physical quantity sensor having beam Physical quantity sensor having beam

2005-08-02

2005-08-02

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C361S280000

Reexamination Certificate

active

06923061

ABSTRACT:
A physical quantity sensor for detecting physical quantity includes a substrate having an opening; a beam protruding in the opening of the substrate and supported on the substrate; and a fixed electrode supported on the substrate. The beam is movable in a vertical direction of the substrate so that the physical quantity in the vertical direction is detectable. The sensor can be minimized, and has excellent output characteristics. Further, a manufacturing cost of the sensor is small.

REFERENCES:
patent: 6744173 (2004-06-01), Behin et al.
patent: 2002/0023492 (2002-02-01), Sakai et al.
patent: A-H10-206457 (1998-08-01), None

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