Physical quantity sensor and method for manufacturing the same

Details Physical quantity sensor and method for manufacturing the same Physical quantity sensor and method for manufacturing the same

2007-02-27

2007-02-27

Williams, Hezron (Department: 2856)

Measuring and testing

Gas analysis

Moisture content or vapor pressure

C073S029020, C073S029050, C073S335020, C326S105000, C326S108000, C361S301100, C361S303000, C361S329000

Reexamination Certificate

active

11220543

ABSTRACT:
A capacitance type humidity sensor includes: a detection substrate including a detection portion on a first side of the detection substrate; and a circuit board including a circuit portion. The detection portion detects humidity on the basis of capacitance change of the detection portion. The circuit portion processes the capacitance change as an electric signal. The detection substrate further includes a sensor pad on a second side of the detection substrate. The sensor pad is electrically connected to the detection portion through a conductor in a through hole of the detection substrate.

REFERENCES:
patent: 3617830 (1971-11-01), Perna, Jr.
patent: 4144636 (1979-03-01), Burkhardt et al.
patent: 4881199 (1989-11-01), Kowalski
patent: 6445565 (2002-09-01), Toyoda et al.
patent: 6566893 (2003-05-01), Kiesewetter et al.
patent: 6580600 (2003-06-01), Toyoda et al.
patent: 6628501 (2003-09-01), Toyoda
patent: 6690569 (2004-02-01), Mayer et al.
patent: 6834547 (2004-12-01), Chen et al.
patent: 6882165 (2005-04-01), Ogura
patent: 2002/0109959 (2002-08-01), Toyoda et al.
patent: 2002/0114125 (2002-08-01), Toyoda et al.
patent: 2004/0254306 (2004-12-01), Isogai et al.
patent: A-56-74992 (1981-06-01), None
patent: A-60-147643 (1985-08-01), None
patent: U-61-26162 (1986-02-01), None
patent: A-62-182643 (1987-08-01), None
patent: U-2-140351 (1990-11-01), None
patent: A-3-109800 (1991-05-01), None
patent: A-4-346492 (1992-12-01), None
patent: A-5-114710 (1993-05-01), None
patent: A-6-58900 (1994-03-01), None
patent: A-9-27665 (1997-01-01), None
patent: A-10-84184 (1998-03-01), None

Affiliated with

Also associated with

Rating

Physical quantity sensor and method for manufacturing the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Physical quantity sensor and method for manufacturing the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Physical quantity sensor and method for manufacturing the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3833824