Physical quantity sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

Reexamination Certificate

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Details

C073S504120

Reexamination Certificate

active

08037755

ABSTRACT:
A physical quantity sensor1comprises a driving circuit4that drives a sensor element based on a reference signal; the sensor element3that is driven by the driving circuit4to convert an externally applied physical quantity to an electrical signal; and an amplifier circuit5that amplifies an output signal of the sensor element3. The driving circuit4controls a driving signal, which drives the sensor element, based on the reference signal so that the driving signal is at a fixed level, and the amplifier circuit5has a gain characteristic that amplifies the output signal in a direction reverse to a direction in which the reference signal varies or the driving signal of the driving circuit varies. This configuration allows the physical quantity sensor to reduce output level variations in the sensor output against signal level variations in the reference signal and to make the sensitivity constant.

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International Search Report of PCT/JP2007/068430, date of mailing Nov. 13, 2007.

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