Physical quantity sensor

Details Physical quantity sensor Physical quantity sensor

2005-08-23

2008-12-23

Coleman, W. David (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Housing or package

Multiple housings

C257SE25006

Reexamination Certificate

active

07468552

ABSTRACT:
A physical quantity sensor includes a package, a circuit chip disposed and held in the package, a sensor chip stacked and fixed on the circuit chip, and a wiring member having flexibility, through which the circuit chip and the package are electrically and mechanically bonded together. In the physical quantity sensor, unwanted external vibrations transmitted to the sensor chip are reduced without an external vibration dumping system such as a rubber pad, because the wiring member weakens the vibrations.

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patent: 2004/0182157 (2004-09-01), Sakai et al.
patent: 2005/0104186 (2005-05-01), Yang et al.
patent: A-9-219423 (1997-08-01), None

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