Physical quantity detecting sensor and actuator

Details Physical quantity detecting sensor and actuator Physical quantity detecting sensor and actuator

2010-12-08

2011-10-11

Martin, Jaydi San (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

Reexamination Certificate

active

08035281

ABSTRACT:
A sensor for detecting a physical quantity includes a piezoelectric thin film device having a lower electrode, a piezoelectric thin film and an upper electrode, and a voltage detecting device connected between the lower and upper electrodes of the piezoelectric thin film device. The piezoelectric thin film is formed of an alkali niobium oxide-based perovskite material expressed by (K1-xNax)NbO3(0<x<1), and a (001)KNNplane diffraction peak of the piezoelectric thin film indicates an angle 2θ from 22.1° to 22.5° in an X-ray diffraction 2θ/θ measurement to a surface of the piezoelectric thin film, and the (001)KNNplane diffraction peak occupies 80% or more of diffraction peaks of the piezoelectric thin film.

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