Photovoltaic elements and process and apparatus for their format

Batteries: thermoelectric and photoelectric – Photoelectric – Panel or array

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136258, 118718, 118719, 118723R, 118723MW, 118723E, 257 53, 257 55, 257458, 437 4, 437101, 437108, 437109, H01L 31075, H01L 3120

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055890075

ABSTRACT:
A photovoltaic element comprises a first non-monocrystalline silicon-containing semiconductor layer of a first-conductivity type, a first i-type non-monocrystalline silicon-containing semiconductor layer formed by microwave plasma CVD, a second i-type non-monocrystalline silicon-containing semiconductor layer formed by high-frequency plasma CVD, and a second non-monocrystalline silicon-containing semiconductor layer of a conductivity type opposite to the first-conductivity type, wherein the second semiconductor layer is formed by plasma doping.

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