Photovoltaic device and manufacturing method thereof

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Amorphous semiconductor material

Reexamination Certificate

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C257S055000

Reexamination Certificate

active

10378609

ABSTRACT:
In a photovoltaic device of the present invention, junction characteristics are improved by enhancing interface characteristics between a crystalline silicon semiconductor and an amorphous silicon semiconductor. In the photovoltaic device, an n-type crystalline substrate (11) and a p-type amorphous silicon thin film (13) are laminated with an i-type amorphous silicon thin film (12) interposed as well as an n-type amorphous silicon thin film (15) is provided on a rear surface of the crystalline silicon substrate (11) by interposing an i-type amorphous silicon thin film (14) between them. Oxygen atoms exist at interfaces between the crystalline silicon substrate (11) and the i-type amorphous silicon thin films (12), (14) in a higher concentration than that in the i-type amorphous silicon thin films (12), (14).

REFERENCES:
patent: 5213628 (1993-05-01), Noguchi et al.
patent: 5705828 (1998-01-01), Noguchi et al.
patent: 5716480 (1998-02-01), Matsuyama et al.
patent: 4-130671 (1992-05-01), None
Isomura, Masao et al., “Boron-compensation effect on hydrogenated amorphous silicon with oxygen and nitrogen impurities”,Appl. Phys. Lett., vol. 68 (9), Feb. 26, 1996.

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