Photovoltaic cell and method of manufacturing polycrystalline se

Details Photovoltaic cell and method of manufacturing polycrystalline se Photovoltaic cell and method of manufacturing polycrystalline se

1991-10-18

1993-06-22

Weisstuch, Aaron

Batteries: thermoelectric and photoelectric

Photoelectric

Cells

136261, 148DIG90, 148DIG122, 148DIG153, 257 49, 257 51, 257 75, 257 66, 257458, 437 4, 437109, 437174, 437967, 437977, 437248, H01L 310392, H01L 310368, H01L 3118

Patent

active

052213650

ABSTRACT:
A thin film transistor and a photovoltaic cell wherein a polycrystalline semiconductive film, having a large grain size and high carrier mobility obtained by heat treatment of a polycrystalline semiconductive film, an amorphous semiconductive film, a microcrystalline semiconductive film or the like on a substrate with a textured surface, is used as a channel layer or a photo-activation layer, the textured surface being formed by etching one surface of the substrate or forming a textured thin film on the substrate.
A method of manufacturing a polycrystalline semiconductive film, wherein a surface of a substrate is etched or a textured thin film is formed on the substrate to form a textured surface, and a polycrystalline semiconductive film, an amorphous semiconductive film, a microcrystalline semiconductive film or the like is formed on the textured surface, and the semiconductive film is polycrystallized by heat treatment.

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patent: 4436557 (1984-03-01), Wood et al.
patent: 4539431 (1985-09-01), Moddel et al.
patent: 5057163 (1991-10-01), Barnett et al.
patent: 5122223 (1992-06-01), Geis et al.
A. M. Barnett et al, Conf. Record, 20th IEEE Photovoltaic Specialists Conf. (1988), pp. 1569-1574.
IEEE Electron Device Letters, vol. EDL-1, No. 8, pp. 159-161, "Hydrogena of Transistors Fabricated in Polycrystalline Silicon Films", Aug. 1980.
IEEE Electron Device Letters, vol. EDL-8, No. 9, pp. 425-427, "Laser-Recrystallized Polycrystalline-Silicon Thin-Film Transistors With Low Leakage Current And High Switching Ratio", Sep. 1987.

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