Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2007-03-13
2007-03-13
Duda, Kathleen (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
Reexamination Certificate
active
10645020
ABSTRACT:
A phototool having a fluorinated phosph(on)ate coating and methods of using the phototool.
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Flynn Richard M.
Lu David D.
Pellerite Mark J.
3M Innovative Properties Company
Duda Kathleen
Gover Melanie G.
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