Photostructuring process

Details Photostructuring process Photostructuring process

1991-12-20

1993-10-05

Rodee, Christopher D.

Radiation imagery chemistry: process, composition, or product th

Micrography, process, composition, or product other than...

430313, 430323, 430325, 430326, 430330, G03C 558, G03F 7039

Patent

active

052503755

ABSTRACT:
A process for producing structures in the submicron range is characterized by the following steps:

REFERENCES:
patent: 4491628 (1985-01-01), Ito et al.
patent: 4837124 (1989-06-01), Wu et al.
patent: 4912018 (1990-03-01), Osuch et al.

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