Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...
Reexamination Certificate
2005-05-03
2005-05-03
Chu, John S. (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Diazo reproduction, process, composition, or product
Composition or product which contains radiation sensitive...
C430S192000, C430S193000, C430S270100, C430S907000
Reexamination Certificate
active
06887643
ABSTRACT:
A photosensitive resin precursor composition exhibiting an excellent film thickness uniformity contains: a heat resistant resin precursor polymer; a radiation sensitive compound; and a solvent expressed by formula (1):R1represents an alkyl group having a carbon number in the range of 1 to 3. R2, R3, R4, and R5each represent hydrogen or an alkyl group having a carbon number in the range of 1 to 3, and l represents an integer in the range of 0 to 3.
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Fujita Yoji
Suwa Mitsuhito
Tomikawa Masao
Chu John S.
Toray Industries Inc.
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