Photosensitive resin compositions

Radiation imagery chemistry: process – composition – or product th – Imaged product – Including resin or synthetic polymer

Reexamination Certificate

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Details

C430S190000, C430S191000, C430S192000, C430S193000, C430S270100, C430S280100, C430S326000, C430S330000

Reexamination Certificate

active

11445764

ABSTRACT:
A photosensitive resin composition comprising:(d) at least one polybenzoxazole precursor polymer(e) at least one compound having structure VIin-line-formulae description="In-line Formulae" end="lead"?V1—Y—V2VIin-line-formulae description="In-line Formulae" end="tail"?wherein Y is selected from S, O, NR2, (HOCH)p, andeach R1is selected H, an alkyl group, an alkenyl group, an alkynyl group, an alkoxy group or a halogen, each R2is selected from H, SH, CH3, C2H5, and a linear or branched C1–C4alkyl group containing a thiol group; p is an integer of from 1 to 4, and wherein V1and V2are independently selected from the group consisting ofwherein, m is independently an integer from 0 to 4 with the proviso that m=0 only when Y=n is an integer from 1 to 5; and each R1is defined as above; and(f) at least one solvent;wherein the amount of the compound of Structure VI present is an amount effective to inhibit residue from forming when the composition is coated on a substrate and the substrate is subsequently processed to form an image, and with the proviso that if the polybenzoxazole precursor polymer solely consists of polybenzoxazole precursor polymers that do not contain a photoactive moiety on the polymer, then(d) at least one photoactive compound is also present in the composition.

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Studies of polyimide/copper interface and its improvement by a two-component primer, Dong, Jian, et al. Department Polymer Science and Engineering, Nanjing University, Nanjing, 210093, Peop. Rep. China, Huethig & Wepf, pp. 143-157, 1995.
The formation of an effective anti-corrosion film on copper surfaces from 2-mercaptobenzimidazole solution, Xue, Gi et al., Dep. Chem., Nanjing Univ., Nanjing, 210008, Peop. Rep. China, Journal of Electroanalytical Chemistry and Interfacial Electrochemistry, pp. 139-148, 1991.

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