Abrading – Abrading process – Utilizing shield
Patent
1998-02-04
1999-07-20
Eley, Timothy V.
Abrading
Abrading process
Utilizing shield
4302841, B24B 100
Patent
active
059249129
ABSTRACT:
Disclosed is a photosensitive resin composition suitable as a resist material against sandblasting for pattern-wise engraving of the surface of a body after photolithographic patterning, which comprises: (a) a urethane compound having a (meth)acrylate group at the molecular end, which is obtained from a polyether or polyester compound having a hydroxy group at the molecular chain end, a diisocyanate compound and a (meth)acrylate compound having a hydroxy group; (b) an alkali-soluble polymeric compound having an acid value in the range from 50 to 250 mg KOH/g; and (c) a photopolymerization initiator.
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Mizusawa Ryuma
Obiya Hiroyuki
Takehana Hiroshi
Yamamoto Tetsuo
Banks Derris H.
Eley Timothy V.
Matsushita Electronics Corporation
Tokyo Ohka Kogyo Co. Ltd.
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