Organic compounds -- part of the class 532-570 series – Organic compounds – Diazooxide or diazotate
Patent
1992-04-23
1993-10-05
Bowers, Jr., Charles L.
Organic compounds -- part of the class 532-570 series
Organic compounds
Diazooxide or diazotate
534556, 430189, 430192, 430193, C07C24500, G03F 7022
Patent
active
052506690
ABSTRACT:
Photosensitive compounds having preferably a functional group such as --SO.sub.2 Cl, --SO.sub.3 H, --SO.sub.3 R, ##STR1## (R, R', R" being alkyl) on a terminal benzene or naphthalene ring connected via a methylene group and ##STR2## moiety are improved in sensitivity to light and thermal stability, and thus useful in a photo resist.
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Endo Masayuki
Nagoya Mamoru
Ogawa Kazufumi
Ohno Keiji
Bowers Jr. Charles L.
Chu John S.
Matsushita Electric - Industrial Co., Ltd.
Wako Pure Chemical Industries Ltd.
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