Photoresist stripping composition

Details Photoresist stripping composition Photoresist stripping composition

1995-01-13

1996-09-10

Harriman, Erin M.

Cleaning compositions for solid surfaces, auxiliary compositions

Cleaning compositions or processes of preparing

For cleaning a specific substrate or removing a specific...

510176, 510254, 510245, 510274, 510407, 510499, 510501, 510493, 510505, C11D 328, C11D 332, C11D 330, C11D 337

Patent

active

055543120

ABSTRACT:
A non-aqueous photoresist stripping composition for effectively preventing the redeposition of alkali metal ions, particularly sodium and potassium ions, on a substrate during the stripping operation is disclosed. The stripping composition comprises:

REFERENCES:
patent: 4770713 (1988-09-01), Ward
patent: 5188675 (1993-02-01), Dormon-Brailsford
patent: 5417877 (1995-05-01), Ward

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