Gas separation: processes – Solid sorption – With plural indirect heat transfer steps on solid sorbent or...
Patent
1994-05-27
1995-06-27
Spitzer, Robert
Gas separation: processes
Solid sorption
With plural indirect heat transfer steps on solid sorbent or...
95143, 95272, 95288, 96135, 96139, 96140, 96142, 55269, 55308, 55319, 55322, 55325, 55444, B01D 5304
Patent
active
054276101
ABSTRACT:
A solvent fume exhaust scrubber (100) for recovering organic vapor from exhaust air which is produced during the manufacture of semiconductors includes a throttling chamber (180) containing a plurality of planar baffles (112, 114, 116, 118 and 120), a planar condenser (130) and a cooling coil (138) which engages and substantially traverses the planar surface of the condenser. The throttling chamber intersects an exhaust duct (152) so that an exhaust stream (182) flows in a flow direction (184) through the chamber. Each baffle and condenser has a planar surface which is disposed at right angles to the flow direction. The surface extends partially across the exhaust stream. The baffles are arranged sequentially along the flow direction and have offsetting planar surfaces across the exhaust stream so that the baffles in combination extend across the exhaust stream. A baffle includes a baffle frame (302) for holding a plurality of carbon beads (306).
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Exhibit I: Internal Memorandum which discusses the installation on Jan. 12, 1994 of exhaust scrubber of the present invention. Date: Approximately Jan. or Feb. 1994.
Exhibit II: Notebook page photocopy including a drawing of the prototype exhaust scrubber, which was installed on Dec. 26, 1989. Author: Michael Croker. Date: Nov. 10, 1989.
Exhibit III: Notebook page photocopy including a drawing of the prototype exhaust scrubber. A cooling coil, which was implemented in the exhaust scrubber approximately Jan. 1990, is added to the Nov. 10, 1989 drawing. Author: Michael Croker. Date: Aug. 25, 1994.
NEC Electronics Inc.
Spitzer Robert
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