Photoresist solution storage and supply device

Details Photoresist solution storage and supply device Photoresist solution storage and supply device

1996-11-29

1999-02-16

Walton, George L.

Fluid handling

Diverse fluid containing pressure systems

Gas pressure storage over or displacement of liquid

137392, 141 59, 141 65, 141 66, 396632, 417 36, 417 441, F16K 3102, F16K 3112

Patent

active

058710280

ABSTRACT:
A photoresist storage and supply device. The device includes a control unit for generating a number of on/off signals. A number of gas supply valves are open to let gas pass according to the on/off signals. A number of photoresist solution storage vessels store photoresist solution and receive the gas from a corresponding gas supply valve. A buffer vessel receives the photoresist solution, under pressure of the gas, from a selected photoresist solution storage vessel. A liquid level sensor mounted on the buffer vessel detects the solution level in the buffer vessel and generates a control signal when the photoresist solution level in the buffer vessel is below a certain threshold. A gas exhaust valve is coupled to the control unit, and expels gas from inside the buffer vessel according to an on/off signal.

REFERENCES:
patent: 3049887 (1962-08-01), Sharp
patent: 3222578 (1965-12-01), Thiele
patent: 3626970 (1971-12-01), Jones
patent: 4398554 (1983-08-01), Kondo
patent: 4841321 (1989-06-01), Kose et al.
patent: 4859375 (1989-08-01), Lipisko et al.

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