Coating apparatus – Program – cyclic – or time control – Having timer
Reexamination Certificate
2005-05-24
2005-05-24
Lorengo, J. A. (Department: 1734)
Coating apparatus
Program, cyclic, or time control
Having timer
C118S703000, C118S699000
Reexamination Certificate
active
06896736
ABSTRACT:
The purging of photoresist from a supply device of semiconductor coating equipment is automatically executed in a controlled manner. The equipment employs a plurality of photoresist bottles for storing the same kind of photoresist. A plurality of supply pipes are respectively connected to the photoresist bottles, respectively. A valve system selectively opens and closes the supply pipes in response to control signals generated by a main controller. A dispense pump forces the photoresist in the open supply pipe through a nozzle. A purge start button issues a purge start command signal to the controller when the button is pressed. The controller then controls the valve system and the dispense pump so as to automatically purge the photoresist according to a sequence effected using a timer.
REFERENCES:
patent: 3992301 (1976-11-01), Shippey et al.
patent: 5330101 (1994-07-01), Turner et al.
patent: 6332924 (2001-12-01), Shim et al.
Kim Jung-Hong
Lee Jong-Hwa
Lee Kwang-Ho
Koch George
Lorengo J. A.
Volentine Francos & Whitt PLLC
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