Photoresist pump dispense detection system

Details Photoresist pump dispense detection system Photoresist pump dispense detection system

2006-02-14

2006-02-14

Wu, Daniel (Department: 2632)

Communications: electrical

Condition responsive indicating system

Specific condition

C340S679000, C222S001000, C216S041000, C439S942000

Reexamination Certificate

active

06998993

ABSTRACT:
A detection circuit that includes a first relay coupled to a solenoid valve for sensing an operation state of the solenoid valve, a second relay coupled to the first relay adapted for activating in response to activation of the first relay, a sensor for detecting an operation state of a device, a third relay coupled to the sensor, wherein the senor is adapted for providing a signal to activate the third relay, and wherein the second relay is deactivated in response to the activation of the third relay, and a fourth relay coupled to the first and second relays, wherein the fourth relay is activated when the first relay is deactivated and the second relay is activated.

REFERENCES:
patent: 5527161 (1996-06-01), Bailey et al.
patent: 6752599 (2004-06-01), Park

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