Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...
Patent
1994-06-17
1996-08-06
Duda, Kathleen
Radiation imagery chemistry: process, composition, or product th
Diazo reproduction, process, composition, or product
Composition or product which contains radiation sensitive...
430190, 430191, 430192, 430193, 528482, G03C 518
Patent
active
055432638
ABSTRACT:
The present invention provides methods for producing photoresist compositions having a very low level of metal ions, utilizing specially treated ion exchange resins. A method is also provided for producing semiconductor devices using such photoresist compositions.
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Durham Dana L.
Rahman M. Dalil
Duda Kathleen
Hoechst Celanese Corporation
Sakyo, Jr. Andrew F.
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