Photoresist compositions

Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...

Reexamination Certificate

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Details

C430S191000, C430S192000, C430S193000, C430S326000

Reexamination Certificate

active

06905809

ABSTRACT:
The present invention relates to a composition and a process for preparing a composition that comprises: 1) a film-forming novolak resin wherein the hydrogen atom of a hydroxyl group in the novolak resin is substituted with a naphthoquinonediazidosulfonyl (DNQ) group in a proportion of less than 3.0 mol % per hydrogen atom to form a partially esterified novolak resin; 2) at least one photosensitive component present in an amount sufficient to photosensitive the photoresist composition; and 3) at least one solvent.

REFERENCES:
patent: 3635709 (1972-01-01), Kobayashi
patent: 4529682 (1985-07-01), Toukhy
patent: 4632891 (1986-12-01), Banks et al.
patent: 4959292 (1990-09-01), Blakeney et al.
patent: 4988601 (1991-01-01), Ushirogouchi et al.
patent: 5001040 (1991-03-01), Blakeney et al.
patent: 5145763 (1992-09-01), Bassett et al.
patent: 5238775 (1993-08-01), Kajita et al.
patent: 5279918 (1994-01-01), Nishi et al.
patent: 5290656 (1994-03-01), Uetani et al.
patent: 5413896 (1995-05-01), Kajita et al.
patent: 5422221 (1995-06-01), Okazaki et al.
patent: 5529880 (1996-06-01), Zampini et al.
patent: 5589553 (1996-12-01), Zampini et al.
patent: 5700620 (1997-12-01), Sakaguchi et al.
patent: 5932396 (1999-08-01), Kamijima
patent: 6210855 (2001-04-01), Ueda et al.
patent: 6218069 (2001-04-01), Kato et al.
patent: 6242151 (2001-06-01), Furihata et al.
patent: 6379859 (2002-04-01), Suzuki et al.
patent: 6436601 (2002-08-01), Seth et al.
patent: 6451496 (2002-09-01), Ueda et al.
patent: 6475693 (2002-11-01), Susukida et al.
patent: 6503682 (2003-01-01), Kim et al.
patent: 2001/0018160 (2001-08-01), Ueda et al.
patent: 0 443 533 (1991-08-01), None
patent: 0 554 101 (1993-08-01), None
patent: 1 227 602 (1971-04-01), None
patent: 1 546 633 (1975-05-01), None
patent: 64-35435 (1989-02-01), None
English language translation of JP64-35435.

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