Photoreactive surface cleaning

Details Photoreactive surface cleaning Photoreactive surface cleaning

1996-11-12

1998-09-29

Stinson, Frankie L.

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

134 19, 134201, B08B 312

Patent

active

058141561

ABSTRACT:
Foreign material on a surface of a substrate is processed to form a non-solid by-product by providing a gaseous reactant in the vicinity of the foreign material and delivering a beam of radiation to aid the gaseous reactant to react with the foreign material to form the non-solid by-product.
In another aspect, radiation for cleaning a surface of a substrate is provided by a laser configured to deliver an original beam of ultraviolet radiation, and optics (e.g., a pair of orthogonal cylindrical mirrors) for shaping the beam to have a cross-section in the form of a line having a width smaller than any dimension of a cross-section of the original beam and a length at least ten times larger than any dimension of the original beam.

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