Photoprocessing method

Details Photoprocessing method Photoprocessing method

1997-04-25

1999-08-03

Angebranndt, Martin

Electric heating

Metal heating

By arc

21912177, 21912169, 430945, 430321, 438940, 438795, 136261, 136244, H01L 2100

Patent

active

059321180

ABSTRACT:
In processing an object to be processed by a laser beam, the laser beam is expanded by a beam expander and is introduced into a mask in which a light transmitted portion having a desired pattern is formed, the laser beam introduced into the mask is passed through the light transmitted portion having a desired pattern, to obtain a laser beam corresponding to the pattern of the light transmitted portion as well as having an approximately uniform energy distribution, the laser beam is formed and projected on the object to be processed by an image forming lens, and processing corresponding to the pattern of the light transmitted portion is performed on the object to be processed by the laser beam formed and projected. By this photoprocessing, a part of photoelectric converting elements in a photovoltaic device are removed to perform groove processing, or an amorphous semiconductor film is crystallized.

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