Photonic structures, devices, and methods

Details Photonic structures, devices, and methods Photonic structures, devices, and methods

2007-08-14

2007-08-14

Olsen, Allan (Department: 1763)

Etching a substrate: processes

Forming or treating optical article

C216S052000, C216S057000

Reexamination Certificate

active

10755955

ABSTRACT:
Photonic crystal structures are made by a method including steps of providing a substrate, depositing at least one planar layer to form a stack, each planar layer of the stack comprising two or more sublayers having different sublayer refractive indices, depositing a hard mask material, depositing an imprintable material over the hard mask material, patterning the imprintable material by imprinting an array of depressions, and directionally etching at the depressions a regular array of openings through the hard mask material and the stack.

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