Photonic coupling scheme for photodetectors

Details Photonic coupling scheme for photodetectors Photonic coupling scheme for photodetectors

2006-11-17

2009-11-03

Lebentritt, Michael S (Department: 2829)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C438S035000, C438S050000, C438S092000, C438S099000, C257SE21152, C257SE21153, C257SE21161, C257SE21464, C257SE21573

Reexamination Certificate

active

07611920

ABSTRACT:
A room temperature operation polycrystalline infrared responsive photodetector, manufactured by a process, comprising the steps of patterning vacuum-deposited material and dry-etching a photonic crystal structure with resonant coupling tuned to long wavelengths.

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