Bookbinding: process and apparatus – Apparatus – Book working apparatus
Patent
1992-03-31
1995-09-19
Walsh, Donald P.
Bookbinding: process and apparatus
Apparatus
Book working apparatus
422186, 422906, B01J 1912
Patent
active
054513782
ABSTRACT:
A method and apparatus to decompose nonhydrolyzable ambients such as chloluorocarbons and nitrogen trifluoride which enables the conventional disposal of their byproducts are disclosed. It employs photo-decomposition of the nonhydrolyzable ambient using UV light and a mediating species to allow chemical reactions to occur which form an effluent which is hydrolyzed by conventional methods. This abatement process is amenable to point-of-use decomposition systems required for modular cluster tool systems used in microelectronic device fabrication.
REFERENCES:
"MPSC is it Working?" Semiconductor International, vol. 66, Oct '91.
"Toxic Gas: A Cause for Alarm" Semiconductor International Nov. '91.
Russell Stephen D.
Sexton Douglas A.
Fendelman Harvey
Jenkins Daniel
Keough Thomas Glenn
The United States of America as represented by the Secretary of
Walsh Donald P.
LandOfFree
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