Photometric stereoscopic shape measuring method

Details Photometric stereoscopic shape measuring method Photometric stereoscopic shape measuring method

1986-10-08

1988-07-05

Wan, Gene

Optics: measuring and testing

By polarized light examination

With light attenuation

356 2, 250558, G01B 1100

Patent

active

047550473

ABSTRACT:
Method of determining stereoscopic geometry of an object through photometric stereoscopic measurement with high accuracy. Three or more images of the object picked up in a same fixed direction by varying the state of light sources are derived. Relationships among the images are corrected so that an evaluation function determined by making use of redundancy of the images assumes a minimum value, to thereby prepare a reflectance map to be used in determining orientations of surface elements of the object. Through integration of the orientations, the surface shape of the object is determined. The method is applicable to the image processing in a scanning electron microscope.

REFERENCES:
patent: 4269513 (1981-05-01), DiMatteo et al.

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