Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2005-01-11
2005-01-11
Mohamedulla, Saleha R. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
Reexamination Certificate
active
06841313
ABSTRACT:
A photomask having dies relating to different functionalities is disclosed. A photomask for performing lithography in conjunction with fabrication of one or more semiconductor devices includes one or more first semiconductor dies and one or more second semiconductor dies. Each first semiconductor die relates to first functionality having a first definition grade. Each second semiconductor die relates to second functionality different than the first functionality. The second functionality has a second definition grade at least substantially close to the first definition grade. For instance, the second definition grade may be identical to the first definition grade, or it may be immediately adjacent (i.e., sequentially related) to the first definition grade.
REFERENCES:
patent: 6680150 (2004-01-01), Blatchford et al.
Hsieh Yeou-Hsin
King Yu-Chin
Tsai Fei-Gwo
Tu Chih-Chiang
Mohamedulla Saleha R.
Taiwan Semiconductor Manufacturing Co. Ltd.
Tung & Associates
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