Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent
1995-02-28
1996-02-13
Powell, William
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
1566431, 216 12, 216 24, 430 5, 430321, H01L 21306, B44C 122
Patent
active
054908965
ABSTRACT:
A photomask or a light-shielding member has a support capable of transmitting light, a light-shielding pattern which shields the light and a light absorbing member provided corresponding to the light-shielding pattern. In one aspect, the light-shielding pattern and the light absorbing member are provided on the same side of the support. In another aspect, the light-shielding pattern and the light absorbing member are provided with the support sandwiched therebetween.
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Kawate Shinichi
Komatsu Toshiyuki
Sato Yasue
Yagi Takayuki
Canon Kabushiki Kaisha
Powell William
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