Photomask manufacturing support system

Details Photomask manufacturing support system Photomask manufacturing support system

2005-03-30

2010-02-16

Ahmed, Samir A. (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

Reexamination Certificate

active

07664307

ABSTRACT:
A drawing data inputting/interpreting section of a data processing device reads in hierarchical structured drawing data from a first memory device and stores interpreted drawing data information extracted as graphic information in a second memory device. A data analysis section reads in the interpreted drawing data information, analyzes information necessary for a drawing step, and stores the same as drawing analysis results in the second memory device. In addition, a data conversion section reads in the interpreted drawing data information, and after a format conversion to inspection data, stores the converted inspection data in the second memory device. Thereby, a drawing data analysis step and an inspecting data conversion step can be carried out in parallel.

REFERENCES:
patent: 5046109 (1991-09-01), Fujimori et al.
patent: 6272236 (2001-08-01), Pierrat et al.
patent: 6461882 (2002-10-01), Ishida et al.
patent: 2004/0148584 (2004-07-01), Tokunaga et al.
patent: 9-288687 (1997-11-01), None
patent: 09-288687 (1997-11-01), None

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