Photomask inspection and verification by lithography image...

Details Photomask inspection and verification by lithography image... Photomask inspection and verification by lithography image...

2011-08-09

2011-08-09

Ahmed, Samir A (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C382S260000

Reexamination Certificate

active

07995832

ABSTRACT:
A method and tool for generating reconstructed images that model the high NA effects of a lithography tool used to image patterns produced by a mask. Comparison of the reconstructed images with reference images characterize the mask. The method involves providing a mask reticle for inspection. Generating matrix values associated with a high NA corrective filter matrix that characterizes a high NA lithography system used to print from the mask. Illuminating the mask to produce a patterned illumination beam that is filtered with filters associated with the high NA corrective filter matrix elements to obtain a plurality of filtered beams that include raw image data that is processed to obtain a reconstructed image that is further processed and compared with reference images to obtain mask characterization information.

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