Photomask including contrast enhancement layer and method of...

Details Photomask including contrast enhancement layer and method of... Photomask including contrast enhancement layer and method of...

2007-03-29

2010-10-05

Rosasco, Stephen (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

Reexamination Certificate

active

07807319

ABSTRACT:
A photomask and a method of making same. The photomask includes a plate defining transparent regions in a predetermined pattern and opaque regions, the transparent regions adapted to transmit light therethrough; and a contrast enhancement layer disposed over an entire surface of at least one of the transparent regions and the opaque regions.

REFERENCES:
patent: 5422205 (1995-06-01), Inoue et al.
patent: 5965301 (1999-10-01), Nara
patent: 6844235 (2005-01-01), Jones et al.
patent: 7160651 (2007-01-01), Pinkerton

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