Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2004-10-26
2008-08-19
Bella, Matthew C. (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C382S224000, C382S283000, C382S287000
Reexamination Certificate
active
07415150
ABSTRACT:
One embodiment of the present invention provides a system that computes translational differentials between a “perfect” image (henceforth called a database-image) and a scanned-image of a photomask. During operation, the system receives a noise-free database-image and a scanned-image that is generated by an imaging process. Next, the system computes a set of candidate-translational-differentials using the database-image and the scanned-image. The system then generates one or more sets of translated directional-gradient-images based on the set of candidate-translational-differentials and using the database-image and the scanned-image. Next, the system converts the database-image into a set of smoothed directional-gradient-images. Finally, the system computes translational differentials by performing a normalized correlation using the set of smoothed directional-gradient-images and the one or more sets of translated directional-gradient-images. Note that the computational time is significantly reduced because the method performs normalized correlation using only the set of candidate-translational-differentials, instead of exhaustively performing normalized correlation using all possible translational differentials.
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Bella Matthew C.
Park Vaughan & Fleming LLP
Rahmjoo Mike
Synopsys Inc.
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