Drying and gas or vapor contact with solids – Apparatus – Supports
Patent
1976-08-30
1978-01-17
Camby, John J.
Drying and gas or vapor contact with solids
Apparatus
Supports
34240, 34DIG11, 219379, 219380, F26B 2100
Patent
active
040683907
ABSTRACT:
The dryer is used for drying developed photomasks of the type used in manufacturing integrated circuit devices. The dryer provides a continuous flow of very clean, warm, dry air over photomasks placed in it to dry. The dryer comprises a box having a series of distributor tubes extending into it. Drying racks holding photomasks hang from the distributor tubes and heated, filtered air flows from at least one slot in the distributor tube over the wet photomasks to dry them.
REFERENCES:
patent: 500634 (1893-07-01), Tymeson
patent: 758451 (1904-04-01), Judelson
patent: 1018037 (1912-02-01), Dunham
patent: 2209054 (1940-07-01), Doud et al.
patent: 2598603 (1952-05-01), Richtarsic
patent: 2668368 (1954-02-01), Jacobs
patent: 2782526 (1957-02-01), Cota
patent: 2917179 (1959-12-01), Casey et al.
patent: 3069002 (1962-12-01), Hart
patent: 3206868 (1965-09-01), Bascom
patent: 3306794 (1967-02-01), Humbert, Jr.
Geshner Robert Andrew
Sciambi Louis Joseph
Asman Sanford J.
Camby John J.
Christoffersen H.
RCA Corporation
Williams R. P.
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