Photomask blanks comprising transmissive embedded phase shifter

Details Photomask blanks comprising transmissive embedded phase shifter Photomask blanks comprising transmissive embedded phase shifter

1994-02-14

1995-05-16

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

428 34, 428448, G03F 900

Patent

active

054159539

ABSTRACT:
Transmissive embedded phase shifter-photomask blanks are disclosed which comprise an optically inhomogeneous attenuating film which has a transmission of at least 0.001 at the lithographic wavelength and consists essentially of a combination of multiple components with one of the components having a higher absorbance than another at the lithographic wavelength, One depth from a surface of the films has a higher content of the higher absorbing component than another depth and the profile of change in refractive index and/or extinction coefficient is gradual through the film thickness, Said profile(s) of change and the film thickness are selected to provide a phase shift of about 180.degree. (or an odd multiple thereof) at a selected lithographic wavelength.

REFERENCES:
patent: 4415262 (1983-11-01), Koyama et al.
patent: 4890309 (1989-12-01), Smith et al.
patent: 5187726 (1993-02-01), White
patent: 5230971 (1993-07-01), Alpay
Aspnes, D. E., Handbook of Optical Constants of Solids, Chap. 5, pp. 89-112, 1985.
"Si-N Attenuated Phase Shift Layer for Phase Shift Mask Application", IBM Technical Disclosure Bulletin, 35(3), 440-441, Aug. 1992.
Heavens, O. S., "Optical Properties of Thin Solid Films", Dover Publications, N.Y., 1965, 69-80.
Lin, B. J. "The Attenuated Phase-Shifting Mask", Solid State Technology, 35(1), 43-47, Jan. 1992.

Affiliated with

Also associated with

Rating

Photomask blanks comprising transmissive embedded phase shifter does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Photomask blanks comprising transmissive embedded phase shifter, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Photomask blanks comprising transmissive embedded phase shifter will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-636832