Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1993-12-30
1995-04-11
Wintercorn, Richard A.
Photocopying
Projection printing and copying cameras
Step and repeat
355 1, 355 70, G03B 2742, G03B 2754
Patent
active
054063515
ABSTRACT:
A photolithographic system wherein optical fiber routing is used to combine two or more ultraviolet light sources for reticle illumination.
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SPIE, vol. 1088 Optical/Laser Microlithography II (1989), Excimer Laser Stepper for Sub-half Micron Lithography, Akikazu Tanimoto et al.; Nikon Corp.
SPIE, vol. 633 Optical Microlithography V (1986), Excimer laser-based lithography: a deep ultrioviolet wafer stepper; Pol et al.; AT&T Bell Laboratories.
SPIE, vol. 1264 Optical/Laser Microlithography III (1990), Reduction Lens and Illumination System for Dee-UV-Aligners; Liegel et al.; Carl Zeiss, West Germany.
PAS 5500 User Guide Release 3, ASM Lithography BV, Veldhoven, The Netherlands, 1993.
Sardella John C.
Stagaman Gregory J.
Groover Robert
Jorgenson Lisa K.
Robinson Richard K.
SGS-Thomson Microelectronics Inc.
Wintercorn Richard A.
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