Photolithographically produced flat panel display surface plate

Details Photolithographically produced flat panel display surface plate Photolithographically produced flat panel display surface plate

1996-01-11

1999-06-29

Ramsey, Kenneth

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

H01J 900

Patent

active

059160047

ABSTRACT:
Fabrication of support structures for use in field emitter displays through a photolithographic process that involves (1) depositing a photolithable material on a substrate, (2) etching the material to create column areas in the material, (3) filling the column areas with a support material, (4) planarizing the support material, photolithable material, and the filled column areas to the desired height, and (5) removing the remaining photolithable material by exposing the filled column areas as support structures on the substrate.

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