Photolithographically patterned spring contact

Details Photolithographically patterned spring contact Photolithographically patterned spring contact

1999-03-25

2001-02-06

Graybill, David E. (Department: 2814)

Semiconductor device manufacturing: process

Packaging or treatment of packaged semiconductor

Incorporating resilient component

C438S611000

Reexamination Certificate

active

06184065

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention generally relates to photolithographically-patterned spring contacts for use in electrically bonding integrated circuits, circuit boards, electrode arrays, or other devices.
2. Description of Related Art
Standard bonding techniques for electrically connecting integrated circuits, or chips, to a circuit board or other device include wire bonding, tab bonding, solder-bump and gold-bump flip-chip bonding and other techniques.
FIG. 1
shows a contact pad
3
formed on a chip
2
wire bonded to a corresponding contact pad
3
formed on a substrate
1
. The contact pads
3
are electrically connected, or bonded, by a wire
4
. Since the chip
2
typically has tens or even hundreds of the contact pads
3
, wire bonding each contact pad
3
on the chip
2
to the corresponding contact pad
3
on the substrate
1
is labor intensive, expensive and slow. Further, the contact pads
3
must be large enough to accommodate both the wire
4
and the accuracy of the wire bonding device used to create the wire bond. Therefore, the contact pads
3
are made larger than otherwise necessary to compensate for the size limitations of the wire
4
and the wire bonding device.
FIG. 2
shows the contact pad
3
formed on the chip
2
tab bonded to the corresponding contact pad
3
on the substrate
1
. A flexible substrate
5
having conductive lines formed on its lower surface is forced against the contact pads
3
. A layer of anisotropic adhesive (not shown) is placed between the contact pads
3
and the flexible substrate
5
. When the flexible substrate
5
is pressed against the contact pads
3
, the anisotropic adhesive and the conductive lines formed on the flexible substrate
5
cooperate to complete the electrical connection between the contact pads
3
. Like wire bonding, tab bonding suffers from yield loss, bond fragility, and high cost.
Another conventional method for bonding the contact pads
3
formed on the chip
2
to the contact pads
3
formed on the substrate
1
or to some other device is solder-bump flip-chip bonding.
FIG. 3
shows the chip
2
inverted with the contact pads
3
facing toward the substrate
1
. The name “flip-chip” derives from the inversion of the chip
2
, since the chip
2
is “flipped over” with the contacts pads
3
facing the substrate
1
, in contrast to both tab bonding and wire bonding where the contact pads
3
on the chip
2
face away from the substrate
1
. Note, however, that tab bonding can also be done with the chip
2
“flipped over”. In standard flip-chip bonding, solder bumps
6
are formed on the contact pads
3
on the substrate
1
or on the chip
2
. The electrical connection between the corresponding contact pads
3
is completed by pressing the contact pads
3
on the chip
2
against the solder bumps
6
and melting the solder bumps
6
.
Flip-chip bonding is an improvement over both wire bonding and tab bonding. The relatively soft solder bumps
6
tend to permanently deform when the chip
2
is pressed down against the solder bumps
6
. This deformation of the solder bumps
6
compensates for some irregularity in the heights of the contact pads
3
and any uneven contacting pressure forcing the chip
2
against the solder bumps
6
.
However, flip-chip bonding does suffer from both mechanical and thermal variations in the solder bumps
6
. If the solder bumps
6
are not uniform in height or if the substrate
1
is warped, contact between the contact pads
3
and the solder bumps
6
can be broken. Also, if the contacting pressure forcing the chip
2
down on the solder bumps
6
is uneven, contact between some contact pads
3
and corresponding solder bumps
6
can fail. In addition, stresses from thermal expansion mismatches between the chip
2
and the substrate
1
can break the bonds formed by the solder bumps
6
.
In contrast to the relatively permanent bonds described above,
FIG. 4
shows a standard technique for establishing a temporary electrical contact between two devices. A probe card
7
having a plurality of probe needles
8
contacts the contact pads
3
by physically pressing the probe needles
8
against the contact pads
3
. The physical contact between the probe needles
8
and the contact pads
3
creates an electrical connection between the probe needles
8
and the lines
9
formed on the substrate
1
.
The probe cards
7
are generally used to create only temporary contacts between the probe needles
8
and the contact pads
3
, so that the device
10
can be tested, interrogated or otherwise communicated with. The device
10
can be a matrix of display electrodes which are part of an active-matrix liquid crystal display. Testing of the devices
10
, such as liquid crystal display electrode matrices, is more thoroughly described in an U.S. patent application Ser. No. 08/473,912 to the same inventor, co-filed and co-pending herewith and herein incorporated by reference.
The probe cards
7
have many more applications than only for testing liquid crystal displays. Any device
10
having numerous and relatively small contact pads
3
, similar to those found on the chip
2
, can be tested using the probe card
7
. However, standard techniques for producing the probe card
7
are time consuming and labor-intensive. Each probe card
7
must be custom-made for the particular device
10
to be tested. Typically, the probe needles
8
are manually formed on the probe card
7
. Because the probe cards
7
are custom-made and relatively expensive, the probe cards
7
are not typically made to contact all of the contact pads
3
on the device
10
at one time. Therefore, only portions of the device
10
can be communicated with, tested or interrogated at any one time, requiring the probe card
7
be moved to allow communication, testing or interrogation of the entire device
10
.
The probe cards
7
are also used to test the chips
2
while the chips
2
are still part of a single-crystal silicon wafer. One such probe card
7
is formed by photolithographic pattern plated processing, as disclosed in
Probing at Die Level
, Corwith, Advanced Packaging, February, 1995, pp. 26-28. Photolithographic pattern plated processing produces probe cards
7
which have essentially the same design as the standard probe card
7
. However, this new type of processing appears to automate the method for producing probe needles
8
, thus avoiding manually forming the probe needles
8
. Also, this article discloses a probe card
7
which is bent at the end nearest the probe needles
8
, as shown in FIG.
5
. The bend in the probe card
7
allows the probe needles
8
to contact the contact pad
3
at an angle. As the probe card
7
pushes the probe needles
8
into the contact pads
3
, a mechanical scrubbing action occurs which allows the probe needles
8
to break through the oxide formed on the top surface of the contact pad
3
. All of the standard probe cards
7
, however, are limited to testing contact pads
3
which are arranged in a linear array.
SUMMARY OF THE INVENTION
Accordingly, this invention provides a spring contact which exhibits the speed and ease of solder-bump flip-chip bonding while eliminating the need to create uniform solder bumps or uniform contacting pressure. Also, the invention provides finer-pitch contact arrays than solder-bump flip-chip bonding.
This invention further provides a spring contact which has elastic properties enabling the spring contact to maintain physical contact with a contact pad despite variations in contact pad heights, contacting pressure, thermal variations or mechanical shock.
This invention also provides an elastic spring contact having a stress gradient formed in the spring contact, which causes the spring contact to bend away from the substrate and thus provide compliant contact with a contact pad.
This invention further provides a probe card and a method for producing the probe card having spring contacts in place of standard probe needles.
The spring contacts of this invention are formed of a thin metal strip which is

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