Photolithographically-patterned out-of-plane coil structures...

Electricity: electrical systems and devices – Housing or mounting assemblies with diverse electrical... – For electronic systems and devices

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C336S192000, C336S200000, C336S233000, C336S232000, C439S074000, C439S081000

Reexamination Certificate

active

06947291

ABSTRACT:
An out-of-plane micro-structure which can be used for on-chip integration of high-Q inductors and transformers places the magnetic field direction parallel to the substrate plane without requiring high aspect ratio processing. The photolithographically patterned coil structure includes an elastic member having an intrinsic stress profile. The intrinsic stress profile biases a free portion away from the substrate forming a loop winding. An anchor portion remains fixed to the substrate. The free portion end becomes a second anchor portion which may be connected to the substrate via soldering or plating. A series of individual coil structures can be joined via their anchor portions to form inductors and transformers.

REFERENCES:
patent: 5372967 (1994-12-01), Sundaram et al.
patent: 5425167 (1995-06-01), Shiga et al.
patent: 5444599 (1995-08-01), Dupraz et al.
patent: 5446616 (1995-08-01), Warren
patent: 5613861 (1997-03-01), Smith et al.
patent: 5619071 (1997-04-01), Myers et al.
patent: 5665648 (1997-09-01), Little
patent: 5848685 (1998-12-01), Smith et al.
patent: 5914218 (1999-06-01), Smith et al.
patent: 5944537 (1999-08-01), Smith et al.
patent: 6147582 (2000-11-01), Goldsmith et al.
patent: 6229684 (2001-05-01), Cowen et al.
patent: 6245444 (2001-06-01), Marcus et al.
patent: WO 99/18445 (1999-04-01), None
Chukwunenye Stanley Nnebe, A Mechanically-raised Micromachined Variable Inductor Coil, www.ee.cornell.edu/MENG/Abstracts/tien.htm, May 19, 1999, pp.1-3.
Youg-Jun Kim and Mark G. Allen, Micr Inductro for High Frequency Applications, www.ece.gatech.edu/research/labs/msmsma/Magnetic/hifinductor.htm, 1995, pp. 1-2, no month.
Lucent Free Standing Inductor, MRP ME Analyst, Nov. 9, 1999.
U.S. Appl. No. 09/573,815, filed May 17, 2000, Christopher L.Chua et al.
U.S. Appl. No. 09/573,363, filed May 17, 2000, Christopher L. Chua et al.
U.S. Appl. No. 09/975,358, filed Oct. 11, 2001, Christopher L. Chua et al.
U.S. Appl. No. 09/591,262, filed Jun. 9, 2000, David K. Biegelsen et al.
U.S. Appl. No. 10/004,819, filed Dec. 7, 2001, David K. Biegelsen et al.
U.S. Appl. No. 09/572,200, filed May 17, 2000, David K. Fork.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Photolithographically-patterned out-of-plane coil structures... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Photolithographically-patterned out-of-plane coil structures..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Photolithographically-patterned out-of-plane coil structures... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3388291

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.