Photolithographic technique and illuminator using real-time addr

Details Photolithographic technique and illuminator using real-time addr Photolithographic technique and illuminator using real-time addr

1994-06-16

1996-07-23

Ben, Loha

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359254, 359315, 359316, 359245, 359295, 372 27, G02F 109

Patent

active

055395678

ABSTRACT:
A phase shift illuminator (700) is comprised of a light source (704) and a phase modulator (716), typically a flexure beam micromirror array, which transversely modulates the incident light beam. When a flexure beam micromirror array is used as the phase modulator (716) a polarizing beam splitter (712) and a quarter-wave plate (714) are used to separate the incident and reflected light beams. The phase modulated light beam (720) from the optical illuminator may be used in optical lithography by passing the light beam through a lithography mask (724), typically after the light beam is phase modulated, and focusing the light beam onto a target wafer (726).

REFERENCES:
patent: 3746785 (1973-07-01), Goodrich
patent: 3884549 (1975-05-01), Wang et al.
patent: 3970959 (1976-07-01), Wang et al.
patent: 4492435 (1985-01-01), Banton et al.
patent: 4698602 (1987-10-01), Armitage
patent: 5061048 (1991-10-01), Hayden et al.
patent: 5093747 (1992-03-01), Dorschner
patent: 5122894 (1992-06-01), Grantham
patent: 5150241 (1992-09-01), Joffre et al.
patent: 5153688 (1992-10-01), Oda et al.
patent: 5255118 (1993-10-01), Hecht

Affiliated with

Also associated with

Rating

Photolithographic technique and illuminator using real-time addr does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Photolithographic technique and illuminator using real-time addr, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Photolithographic technique and illuminator using real-time addr will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-717770