Photolithographic stepper and/or scanner machines including...

Details Photolithographic stepper and/or scanner machines including... Photolithographic stepper and/or scanner machines including...

2008-05-13

2008-05-13

Stinson, Frankie L. (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

With means for collecting escaping material

C134S11500R, C134S16600C, C134S198000

Reexamination Certificate

active

10636132

ABSTRACT:
Stepper and/or scanner machines including cleaning devices and methods for cleaning stepper and/or scanner machines are disclosed herein. In one embodiment, a stepper and/or scanner machine includes a housing, an illuminator, a lens, a workpiece support, a cleaning device for removing contaminants from the workpiece support, and a stage carrying the workpiece support. The stage and/or cleaning device is movable to selectively position the workpiece support proximate to the cleaning device. It is emphasized that this Abstract is provided to comply with the rules requiring an abstract. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims. 37 C.F.R. § 1.72(b).

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