Photolithographic method of fabricating fresnel lenses

Details Photolithographic method of fabricating fresnel lenses Photolithographic method of fabricating fresnel lenses

1997-03-14

1998-09-29

Nelms, David C.

Optical: systems and elements

Lens

With multipart element

G02B 308

Patent

active

058153276

ABSTRACT:
A method for making a fresnel lens on a substrate by forming a plurality of annular rings. Each ring has a plurality of steps, with each step having an inner wall and an outer wall, and an upper surface. The first step is formed on the substrate, and successive steps are formed at least partially on the upper surface of the previous step such that the outer wall of each successive annular step is offset from the outer wall of the previous annular step in an outward radial direction

REFERENCES:
patent: 4643752 (1987-02-01), Howard et al.
patent: 4645523 (1987-02-01), Howard et al.
patent: 5073007 (1991-12-01), Kedmi et al.
patent: 5151826 (1992-09-01), Pasco
patent: 5161059 (1992-11-01), Swanson et al.
patent: 5486950 (1996-01-01), Collinge
"Binary Optics,"Veldkamp et al., Scienctific American, vol. 266, No. 5, pp. 92-97, May 1992.

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