Radiation imagery chemistry: process – composition – or product th – Plural exposure steps
Reexamination Certificate
2011-04-05
2011-04-05
Rosasco, Stephen (Department: 1721)
Radiation imagery chemistry: process, composition, or product th
Plural exposure steps
C430S005000, C430S311000
Reexamination Certificate
active
07919231
ABSTRACT:
A photolithographic method for forming a plurality of characters on a device utilizes a mask set that includes a plurality of photolithographic masks, wherein each mask includes at least one non-opaque mask character field area that surrounds a non-opaque mask character area. Photoresist is exposed to radiation energy density through the set of masks using the masks sequentially to create at least one character field area of the photoresist, and a character area of the photoresist. Ultimately, because the character areas of the photoresist are exposed to some light energy density from the non-opaque mask character field areas during each mask exposure step, the total photoresist exposure time to create the series of characters is less than that of the prior art.
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Gutberlet Mary Kathryn
Nader Rambod
Parker Michael Andrew
Werner Douglas Johnson
Fraser Stewart A
Hitachi Global Storage Technologies - Netherlands B.V.
Rosasco Stephen
Zilka-Kotab, PC
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