Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge
Patent
1992-06-22
1994-06-07
Valentine, Donald R.
Chemistry: electrical and wave energy
Processes and products
Electrostatic field or electrical discharge
20412965, 20412975, 20412995, C25F 312
Patent
active
053186761
ABSTRACT:
A polished wafer of single-crystal silicon (Si) is ohmically contacted on its backside to a copper wire to provide a working electrode. The wafer and a counterelectrode are immersed in a solution of aqueous HF and ethanol within an optical quality cuvette. Lithographic images are projected onto the silicon wafer within the solution, and the wafer is etched galvanostatically at a low current density until a predetermined charge density is attained. The areas of an n-type silicon wafer exposed to the light during the etch will exhibit visible luminescence when the wafer is illuminated with an ultraviolet (UV) lamp or other short wavelength visible light. The areas of the wafer that were not exposed to the pattern during etch will not luminesce.
REFERENCES:
patent: 4303482 (1981-12-01), Buhne et al.
patent: 4380865 (1983-04-01), Frye et al.
patent: 4460621 (1984-07-01), Pearlman
patent: 4874484 (1989-10-01), Foell et al.
patent: 5139624 (1992-08-01), Searson et al.
Image-making on silicon at UC opens new vistas in computing; Scott LaFee; San Diego Union Tribune; Jun. 26, 1992; pp. A1 & A11.
Silicon Quantum Wire Array Fabrication by Electrochemical and Chemical Dissolution of Wafers; L. T. Canham; Appl. Phys. Lett. 57 (10); Sep. 3, 1990; pp. 1046-1048.
Shine On, Holey Silicon; Ivan Amato; Science, vol. 252; pp. 922-923, May 17, 1991.
Porous Silicon Formation: A Quantum Wire Effect; V. Lehmann, et al.; Appl. Phys. Lett. 58(8); Feb. 25, 1991; pp. 856-858.
Photolithographic Fabrication of Micron-Dimension Porous Si Structures Exhibiting Visible Luminescence; Vincent V. Doan, et al.; Appl. Phys. Lett. 60(5), Feb. 3, 1992; pp. 619-620.
Luminescent Color Image Generation on Porous Silicon; Vincent V. Doan, et al.; Science, vol. 256; Jun. 26, 1992; pp. 1791-1792.
Doan Vincent V.
Sailor Michael J.
The Regents of the University of California
Valentine Donald R.
LandOfFree
Photolithographic fabrication of luminescent images on porous si does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Photolithographic fabrication of luminescent images on porous si, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Photolithographic fabrication of luminescent images on porous si will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-790747