Radiant energy – Ionic separation or analysis – With sample supply means
Patent
1993-02-19
1995-03-14
Anderson, Bruce C.
Radiant energy
Ionic separation or analysis
With sample supply means
250282, 250423P, B01D 5944, H01J 4900
Patent
active
053978951
ABSTRACT:
The present invention provides a photoionization mass spectroscopy flux monitor for gaseous species above a sample surface. It provides an in situ, real time, species specific, nonintrusive probe with a geometry compatible with conventional MBE growth chambers. Gaseous species are photoionized above a sample surface and the ionized gaseous species are extracted parallel to the sample surface and coupled into a mass spectrometer inlet adjacent to the sample surface. The geometry of the flux monitor allows for simultaneous coupling of a charged particle beam with the sample surface, for example for monitoring film growth with RHEED.
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Alstrin April L.
Leone Stephen R.
Smilgys Russell V.
Anderson Bruce C.
The United States of America as represented by the Secretary of
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