Photoimaged channel plate for a switch, and method for...

Details Photoimaged channel plate for a switch, and method for... Photoimaged channel plate for a switch, and method for...

2006-08-29

2006-08-29

Friedhofer, Michael A. (Department: 2832)

Electricity: circuit makers and breakers

Liquid contact

Reexamination Certificate

active

07098413

ABSTRACT:
Disclosed herein is a channel plate for a fluid-based switch. The channel plate is produced by 1) depositing a photoimagable dielectric layer onto a substrate, 2) photoimaging at least one channel plate feature on the dielectric layer, and 3) developing the dielectric layer to form the at least one channel plate feature in the dielectric layer, thereby forming the channel plate. A method for making a switch with a photoimaged channel plate is also disclosed.

REFERENCES:
patent: 2312672 (1943-03-01), Pollard, Jr.
patent: 2564081 (1951-08-01), Schilling
patent: 3430020 (1969-02-01), Von Tomkewitsch et al.
patent: 3529268 (1970-09-01), Rauterberg
patent: 3600537 (1971-08-01), Twyford
patent: 3639165 (1972-02-01), Rairden
patent: 3657647 (1972-04-01), Beusman et al.
patent: 3955059 (1976-05-01), Graf
patent: 4103135 (1978-07-01), Gomez et al.
patent: 4200779 (1980-04-01), Zakurdaev et al.
patent: 4238748 (1980-12-01), Goullin et al.
patent: 4245886 (1981-01-01), Kolodzey et al.
patent: 4336570 (1982-06-01), Brower et al.
patent: 4419650 (1983-12-01), John
patent: 4434337 (1984-02-01), Becker
patent: 4475033 (1984-10-01), Willemsen et al.
patent: 4505539 (1985-03-01), Auracher et al.
patent: 4582391 (1986-04-01), Legrand
patent: 4628161 (1986-12-01), Thackrey
patent: 4652710 (1987-03-01), Karnowsky et al.
patent: 4657339 (1987-04-01), Fick
patent: 4742263 (1988-05-01), Harnden, Jr. et al.
patent: 4786130 (1988-11-01), Georgiou et al.
patent: 4797519 (1989-01-01), Elenbaas
patent: 4804932 (1989-02-01), Akanuma et al.
patent: 4988157 (1991-01-01), Jackel et al.
patent: 5278012 (1994-01-01), Yamanaka et al.
patent: 5415026 (1995-05-01), Ford
patent: 5502781 (1996-03-01), Li et al.
patent: 5644676 (1997-07-01), Blomberg et al.
patent: 5675310 (1997-10-01), Wojnarowski et al.
patent: 5677823 (1997-10-01), Smith
patent: 5751074 (1998-05-01), Prior et al.
patent: 5751552 (1998-05-01), Scanlan et al.
patent: 5828799 (1998-10-01), Donald
patent: 5841686 (1998-11-01), Chu et al.
patent: 5849623 (1998-12-01), Wojnarowski et al.
patent: 5874770 (1999-02-01), Saia et al.
patent: 5875531 (1999-03-01), Nellissen et al.
patent: 5886407 (1999-03-01), Polese et al.
patent: 5889325 (1999-03-01), Uchida et al.
patent: 5912606 (1999-06-01), Nathanson et al.
patent: 5915050 (1999-06-01), Russell et al.
patent: 5972737 (1999-10-01), Polese et al.
patent: 5994750 (1999-11-01), Yagi
patent: 6021048 (2000-02-01), Smith
patent: 6180873 (2001-01-01), Bitko
patent: 6201682 (2001-03-01), Mooij et al.
patent: 6207234 (2001-03-01), Jiang
patent: 6212308 (2001-04-01), Donald
patent: 6225133 (2001-05-01), Yamamichi et al.
patent: 6278541 (2001-08-01), Baker
patent: 6304450 (2001-10-01), Dibene, II et al.
patent: 6320994 (2001-11-01), Donald et al.
patent: 6323447 (2001-11-01), Kondoh et al.
patent: 6351579 (2002-02-01), Early et al.
patent: 6356679 (2002-03-01), Kapany
patent: 6373356 (2002-04-01), Gutierrez et al.
patent: 6396012 (2002-05-01), Bloomfield
patent: 6396371 (2002-05-01), Streeter et al.
patent: 6408112 (2002-06-01), Bartels
patent: 6446317 (2002-09-01), Figueroa et al.
patent: 6453086 (2002-09-01), Tarazona
patent: 6470106 (2002-10-01), McClelland et al.
patent: 6487333 (2002-11-01), Fouquet et al.
patent: 6501364 (2002-12-01), Hui et al.
patent: 6512322 (2003-01-01), Fong et al.
patent: 6515404 (2003-02-01), Wong
patent: 6516504 (2003-02-01), Schaper
patent: 6559420 (2003-05-01), Zarev
patent: 6633213 (2003-10-01), Dove
patent: 6646527 (2003-11-01), Dove et al.
patent: 6647165 (2003-11-01), Hu et al.
patent: 6756551 (2004-06-01), Wong
patent: 2002/0037128 (2002-03-01), Burger et al.
patent: 2002/0146197 (2002-10-01), Yong
patent: 2002/0150323 (2002-10-01), Nishida et al.
patent: 2002/0168133 (2002-11-01), Saito
patent: 2003/0035611 (2003-02-01), Shi
patent: 2004/0112727 (2004-06-01), Wong
patent: 2004/0134763 (2004-07-01), Wong et al.
patent: 2004/0144632 (2004-07-01), Wong et al.
patent: 0593836 (1992-10-01), None
patent: 2418539 (1979-09-01), None
patent: 2458138 (1980-12-01), None
patent: 2667396 (1992-04-01), None
patent: SHO 36-18575 (1961-10-01), None
patent: SHO 47-21645 (1972-10-01), None
patent: 62-276838 (1987-12-01), None
patent: 8-125487 (1996-05-01), None
patent: 9161640 (1997-06-01), None
patent: 63-294317 (1998-12-01), None
patent: WO99/46624 (1999-09-01), None
Jonathan Simon, et al. “A Liquid-Filled Microrelay with a Moving Mercury Microdrop”, Journal of Microelectromechanical Systems, Sep. 1997, pp. 208-216, vol. 6, No. 3.
Joonwon Kim et al., “A Micromechanical Switch with Electrostatically Driven Liquid-Metal Droplet” Sensors and Actuators, A:Physical. v 9798, Apr. 1, 2002, 4 pages.
Bhedwar, Homi C., et al., “Ceramic Multilayer Package Fabrication,” Electronic Materials Handbook, Nov. 1989, pp. 460-469, vol. 1 Packaging, Section 4: Packages.

Affiliated with

Also associated with

Rating

Photoimaged channel plate for a switch, and method for... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Photoimaged channel plate for a switch, and method for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Photoimaged channel plate for a switch, and method for... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3650948